Series-resonant VHF micromechanical resonator reference oscillators YW Lin, S Lee, SS Li, Y Xie, Z Ren, CTC Nguyen IEEE Journal of Solid-State Circuits 39 (12), 2477-2491, 2004 | 370 | 2004 |
Micromechanical" hollow-disk" ring resonators SS Li, YW Lin, Y Xie, Z Ren, CTC Nguyen 17th IEEE International Conference on Micro Electro Mechanical Systems …, 2004 | 229 | 2004 |
Planarized sacrificial layer for MEMS fabrication S Lee, SS Li, K Bhattacharjee US Patent 8,278,802, 2012 | 133 | 2012 |
Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps YW Lin, SS Li, Y Xie, Z Ren, CTC Nguyen Proceedings of the 2005 IEEE International Frequency Control Symposium and …, 2005 | 127 | 2005 |
1.52-GHz micromechanical extensional wine-glass mode ring resonators Y Xie, SS Li, YW Lin, Z Ren, CTC Nguyen ieee transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008 | 123 | 2008 |
Method for manufacturing a vibrating MEMS circuit SS Li, S Lee, K Bhattacharjee US Patent 9,369,105, 2016 | 118 | 2016 |
Low phase noise array-composite micromechanical wine-glass disk oscillator YW Lin, SS Li, Z Ren, CTC Nguyen IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest., 4 …, 2005 | 110 | 2005 |
An MSI micromechanical differential disk-array filter SS Li, YW Lin, Z Ren, CTC Nguyen TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007 | 99 | 2007 |
UHF micromechanical extensional wine-glass mode ring resonators Y Xie, SS Li, YW Lin, Z Ren, CTC Nguyen IEEE International Electron Devices Meeting 2003, 39.2. 1-39.2. 4, 2003 | 92 | 2003 |
A monolithic CMOS-MEMS oscillator based on an ultra-low-power ovenized micromechanical resonator MH Li, CY Chen, CS Li, CH Chin, SS Li Journal of Microelectromechanical Systems 24 (2), 360-372, 2014 | 89 | 2014 |
Piezoelectric MEMS resonators: A review G Pillai, SS Li IEEE Sensors Journal 21 (11), 12589-12605, 2020 | 87 | 2020 |
A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits WC Chen, W Fang, SS Li Journal of Micromechanics and Microengineering 21 (6), 065012, 2011 | 87 | 2011 |
High-Q micromechanical resonator devices and filters utilizing same CTC Nguyen, SS Li US Patent 7,295,088, 2007 | 81 | 2007 |
Self-switching vibrating micromechanical filter bank SS Li, YW Lin, Z Ren, CTC Nguyen Proceedings of the 2005 IEEE International Frequency Control Symposium and …, 2005 | 74 | 2005 |
60-MHz wine-glass micromechanical-disk reference oscillator YW Lin, S Lee, SS Li, Y Xie, Z Ren, CTC Nguyen 2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No …, 2004 | 74 | 2004 |
MEMS vibrating structure using a single-crystal piezoelectric thin film layer SS Li, S Lee, K Bhattacharjee US Patent 7,586,239, 2009 | 54 | 2009 |
Advanced CMOS–MEMS resonator platform CS Li, LJ Hou, SS Li IEEE electron device letters 33 (2), 272-274, 2011 | 53 | 2011 |
Thermal-piezoresistive SOI-MEMS oscillators based on a fully differential mechanically coupled resonator array for mass sensing applications CC Chu, S Dey, TY Liu, CC Chen, SS Li Journal of Microelectromechanical Systems 27 (1), 59-72, 2017 | 48 | 2017 |
High-Integrated CMOS-MEMS Resonators With Deep-Submicrometer Gaps and Quasi-Linear Frequency Tuning WC Chen, W Fang, SS Li Journal of microelectromechanical systems 21 (3), 688-701, 2012 | 46 | 2012 |
Bridged micromechanical filters SS Li, MU Demirci, YW Lin, Z Ren, CTC Nguyen Proceedings of the 2004 IEEE International Frequency Control Symposium and …, 2004 | 46 | 2004 |