| Non-contact polishing of single crystal diamond by ion beam etching S Mi, A Toros, T Graziosi, N Quack Diamond and Related Materials 92, 248-252, 2019 | 56 | 2019 |
| Integrated photonic devices in single crystal diamond S Mi, M Kiss, T Graziosi, N Quack Journal of Physics: Photonics 2 (4), 042001, 2020 | 41 | 2020 |
| Silicon photonic MEMS phase-shifter H Sattari, T Graziosi, M Kiss, TJ Seok, S Han, MC Wu, N Quack Optics Express 27 (13), 18959-18969, 2019 | 35 | 2019 |
| Precision micro-mechanical components in single crystal diamond by deep reactive ion etching A Toros, M Kiss, T Graziosi, H Sattari, P Gallo, N Quack Microsystems & Nanoengineering 4 (1), 12, 2018 | 29 | 2018 |
| Single crystal diamond micro-disk resonators by focused ion beam milling T Graziosi, S Mi, M Kiss, N Quack Apl Photonics 3 (12), 2018 | 23 | 2018 |
| Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes A Toros, M Kiss, T Graziosi, S Mi, R Berrazouane, M Naamoun, ... Diamond and Related Materials 108, 107839, 2020 | 22 | 2020 |
| Bistable silicon photonic MEMS switches H Sattari, A Toros, T Graziosi, N Quack MOEMS and Miniaturized Systems XVIII 10931, 97-104, 2019 | 15 | 2019 |
| High-quality single crystal diamond diffraction gratings fabricated by crystallographic etching M Kiss, T Graziosi, A Toros, T Scharf, C Santschi, OJF Martin, N Quack Optics Express 27 (21), 30371-30379, 2019 | 13 | 2019 |
| Trapezoidal diffraction grating beam splitters in single crystal diamond M Kiss, T Graziosi, N Quack Components and Packaging for Laser Systems IV 10513, 264-269, 2018 | 13 | 2018 |
| Die level release of silicon photonic MEMS J Jacobs, T Graziosi, M Kiss, S Han, TJ Seok, MC Wu, N Quack 2016 International Conference on Optical MEMS and Nanophotonics (OMN), 1-2, 2016 | 9 | 2016 |
| Demonstration of V-groove diffraction gratings in single crystal diamond M Kiss, T Graziosi, N Quack International Conference on Diamond and Carbon Materials, Gothenburg, 2017 | 7 | 2017 |
| Silicon photonic MEMS variable optical attenuator T Graziosi, H Sattari, TJ Seok, S Han, MC Wu, N Quack Moems And Miniaturized Systems Xvii 10545, 114-121, 2018 | 5 | 2018 |
| Analog Silicon Photonic MEMS phase-shifter with double-step electrostatic actuation H Sattari, T Graziosi, M Kiss, TJ Seok, S Han, MC Wu, N Quack 2017 International Conference on Optical MEMS and Nanophotonics (OMN), 1-2, 2017 | 5 | 2017 |
| Surface micromachined silicon photonic MEMS: a scalable technology platform for photonic network components N Quack, TJ Seok, S Han, H Sattari, T Graziosi, M Kiss, RS Muller, MC Wu Photonic Networks and Devices, NeM4F. 1, 2018 | 3 | 2018 |
| Freestanding optical micro-disk resonators in single-crystal diamond by reactive ion etching and multidirectional focused ion-beam milling T Graziosi, S Mi, M Kiss, N Quack Advances in Photonics of Quantum Computing, Memory, and Communication XI …, 2018 | 3 | 2018 |
| Characterization of crystallographically etched single crystal diamond diffraction gratings M Kiss, T Graziosi, A Toros, T Scharf, OJF Martin, N Quack 2018 international conference on optical mems and nanophotonics (omn), 1-2, 2018 | 2 | 2018 |
| Single crystalline diamond part production method for stand alone single crystalline mechanical and optical component production N Quack, A Toros, K Marcell, T Graziosi, P Gallo US Patent 11,512,409, 2022 | 1 | 2022 |
| Non-contact polishing of a crystalline layer or substrate by ion beam etching N Quack, MI Sichen, T Graziosi, A Toros | 1 | 2020 |
| Single crystalline diamond diffractive optical elements and method of fabricating the same N Quack, K Marcell, T Graziosi | 1 | 2019 |
| Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators T Graziosi, S Mi, M Kiss, N Quack 2018 International Conference on Optical MEMS and Nanophotonics (OMN), 1-5, 2018 | 1 | 2018 |
