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Kenneth Cadien
Kenneth Cadien
Professor of Materials Engineering, University of Alberta
Verified email at ualberta.ca - Homepage
Title
Cited by
Cited by
Year
On-Chip Optical Interconnects.
MJ Kobrinsky, BA Block, JF Zheng, BC Barnett, E Mohammed, ...
Intel Technology Journal 8 (2), 2004
3252004
Slurries for chemical mechanical polishing
KC Cadien, DA Feller
US Patent 5,340,370, 1994
3181994
XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
P Motamedi, K Cadien
Applied Surface Science 315, 104-109, 2014
1612014
Chemical mechanical polishing slurry delivery and mixing system
DD Danielson, AD Feller, KC Cadien
US Patent 5,407,526, 1995
1331995
MOS transistor having a composite gate electrode and method of fabrication
RS Chau, DB Fraser, KC Cadien, G Raghavan, LD Yau
US Patent 5,625,217, 1997
1311997
Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide
AD Feller, KC Cadien
US Patent 5,700,383, 1997
1301997
Reactive ion etching of SiC thin films using fluorinated gases
J Sugiura, WJ Lu, KC Cadien, AJ Steckl
Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1986
1251986
Method of frabricating a MOS transistor having a composite gate electrode
RS Chau, DB Fraser, KC Cadien, G Raghavan, LD Yau
US Patent 5,783,478, 1998
1201998
Method and apparatus for conditioning of chemical-mechanical polishing pads
KC Cadien, LD Yau
US Patent 5,611,943, 1997
1001997
Slurries for chemical mechanical polishing
KC Cadien, DA Feller
US Patent 5,516,346, 1996
93*1996
Structural and optical characterization of low-temperature ALD crystalline AlN
P Motamedi, K Cadien
Journal of Crystal Growth 421, 45-52, 2015
842015
Growth of single‐crystal metastable semiconducting (GaSb)1−xGex films
KC Cadien, AH Eltoukhy, JE Greene
Applied Physics Letters 38 (10), 773-775, 1981
811981
A SERVOCONTROLLED HYDRAULIC HOT-TORSION MACHINE FOR HOT WORKING STUDIES.
S Fulop, C KC, M HJ
811977
Enhanced rectifying response from metal-insulator-insulator-metal junctions
P Maraghechi, A Foroughi-Abari, K Cadien, AY Elezzabi
Applied Physics Letters 99 (25), 253503, 2011
802011
Sustained electron tunneling at unbiased metal-insulator-semiconductor triboelectric contacts
J Liu, M Miao, K Jiang, F Khan, A Goswami, R McGee, Z Li, L Nguyen, ...
Nano energy 48, 320-326, 2018
762018
Slurries for chemical mechanical polishing tungsten films
KC Cadien, DA Feller
US Patent 5,954,975, 1999
741999
Plug or via formation using novel slurries for chemical mechanical polishing
KC Cadien, DA Feller
US Patent 6,046,099, 2000
672000
Slurry and method for chemical mechanical polishing of copper
A Miller, A Feller, K Cadien
US Patent App. 10/193,794, 2002
642002
Integrated on-chip NMR and ESR device and method for making and using the same
C Park, S Ramanathan, P Morrow, K Cadien
US Patent 7,274,191, 2007
582007
Observation of resonant tunneling phenomenon in metal-insulator-insulator-insulator-metal electron tunnel devices
P Maraghechi, A Foroughi-Abari, K Cadien, AY Elezzabi
Applied Physics Letters 100 (11), 113503, 2012
562012
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