On-Chip Optical Interconnects. MJ Kobrinsky, BA Block, JF Zheng, BC Barnett, E Mohammed, ... Intel Technology Journal 8 (2), 2004 | 325 | 2004 |
Slurries for chemical mechanical polishing KC Cadien, DA Feller US Patent 5,340,370, 1994 | 318 | 1994 |
XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition P Motamedi, K Cadien Applied Surface Science 315, 104-109, 2014 | 161 | 2014 |
Chemical mechanical polishing slurry delivery and mixing system DD Danielson, AD Feller, KC Cadien US Patent 5,407,526, 1995 | 133 | 1995 |
MOS transistor having a composite gate electrode and method of fabrication RS Chau, DB Fraser, KC Cadien, G Raghavan, LD Yau US Patent 5,625,217, 1997 | 131 | 1997 |
Slurries and methods for chemical mechanical polish of aluminum and titanium aluminide AD Feller, KC Cadien US Patent 5,700,383, 1997 | 130 | 1997 |
Reactive ion etching of SiC thin films using fluorinated gases J Sugiura, WJ Lu, KC Cadien, AJ Steckl Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1986 | 125 | 1986 |
Method of frabricating a MOS transistor having a composite gate electrode RS Chau, DB Fraser, KC Cadien, G Raghavan, LD Yau US Patent 5,783,478, 1998 | 120 | 1998 |
Method and apparatus for conditioning of chemical-mechanical polishing pads KC Cadien, LD Yau US Patent 5,611,943, 1997 | 100 | 1997 |
Slurries for chemical mechanical polishing KC Cadien, DA Feller US Patent 5,516,346, 1996 | 93* | 1996 |
Structural and optical characterization of low-temperature ALD crystalline AlN P Motamedi, K Cadien Journal of Crystal Growth 421, 45-52, 2015 | 84 | 2015 |
Growth of single‐crystal metastable semiconducting (GaSb)1−xGex films KC Cadien, AH Eltoukhy, JE Greene Applied Physics Letters 38 (10), 773-775, 1981 | 81 | 1981 |
A SERVOCONTROLLED HYDRAULIC HOT-TORSION MACHINE FOR HOT WORKING STUDIES. S Fulop, C KC, M HJ | 81 | 1977 |
Enhanced rectifying response from metal-insulator-insulator-metal junctions P Maraghechi, A Foroughi-Abari, K Cadien, AY Elezzabi Applied Physics Letters 99 (25), 253503, 2011 | 80 | 2011 |
Sustained electron tunneling at unbiased metal-insulator-semiconductor triboelectric contacts J Liu, M Miao, K Jiang, F Khan, A Goswami, R McGee, Z Li, L Nguyen, ... Nano energy 48, 320-326, 2018 | 76 | 2018 |
Slurries for chemical mechanical polishing tungsten films KC Cadien, DA Feller US Patent 5,954,975, 1999 | 74 | 1999 |
Plug or via formation using novel slurries for chemical mechanical polishing KC Cadien, DA Feller US Patent 6,046,099, 2000 | 67 | 2000 |
Slurry and method for chemical mechanical polishing of copper A Miller, A Feller, K Cadien US Patent App. 10/193,794, 2002 | 64 | 2002 |
Integrated on-chip NMR and ESR device and method for making and using the same C Park, S Ramanathan, P Morrow, K Cadien US Patent 7,274,191, 2007 | 58 | 2007 |
Observation of resonant tunneling phenomenon in metal-insulator-insulator-insulator-metal electron tunnel devices P Maraghechi, A Foroughi-Abari, K Cadien, AY Elezzabi Applied Physics Letters 100 (11), 113503, 2012 | 56 | 2012 |