Oliver Paul
Oliver Paul
Professor for Microsystems Engineering, University of Freiburg
Verified email at imtek.de
TitleCited byYear
Mikrosystemtechnik für Ingenieure
W Menz, O Paul
John Wiley & Sons, 2012
3632012
Magnetic phase transition in two-dimensional ultrathin Fe films on Au (100)
W Dürr, M Taborelli, O Paul, R Germar, W Gudat, D Pescia, M Landolt
Physical review letters 62 (2), 206-209, 1989
3581989
Micromachined thermally based CMOS microsensors
H Baltes, O Paul, O Brand
Proceedings of the IEEE 86 (8), 1660-1678, 1998
2961998
Microsystem technology
W Menz, J Mohr, O Paul
John Wiley & Sons, 2008
2512008
MEMS: A practical guide of design, analysis, and applications
J Korvink, O Paul
Springer Science & Business Media, 2010
2022010
Process-dependent thin-film thermal conductivities for thermal CMOS MEMS
M Von Arx, O Paul, H Baltes
Journal of Microelectromechanical systems 9 (1), 136-145, 2000
1982000
Energy harvesters driven by broadband random vibrations
E Halvorsen
Journal of Microelectromechanical Systems 17 (5), 1061-1071, 2008
1792008
Mechanical properties of thin films from the load deflection of long clamped plates
V Ziebart, O Paul, U Munch, J Schwizer, H Baltes
Journal of Microelectromechanical Systems 7 (3), 320-328, 1998
1261998
Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
S Herwik, S Kisban, AAA Aarts, K Seidl, G Girardeau, K Benchenane, ...
Journal of Micromechanics and Microengineering 19 (7), 074008, 2009
1132009
Multifunctional ZnO‐Nanowire‐Based Sensor
A Menzel, K Subannajui, F Güder, D Moser, O Paul, M Zacharias
Advanced Functional Materials 21 (22), 4342-4348, 2011
1052011
GaN-based micro-LED arrays on flexible substrates for optical cochlear implants
C Goßler, C Bierbrauer, R Moser, M Kunzer, K Holc, W Pletschen, ...
Journal of Physics D: Applied Physics 47 (20), 205401, 2014
972014
Strongly buckled square micromachined membranes
V Ziebart, O Paul, H Baltes
Journal of Microelectromechanical Systems 8 (4), 423-432, 1999
871999
Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array
A Schaufelbuhl, N Schneeberger, U Munch, M Waelti, O Paul, O Brand, ...
Journal of Microelectromechanical systems 10 (4), 503-510, 2001
832001
Single-chip CMOS anemometer
F Mayer, A Haberli, H Jacobs, G Ofner, O Paul, H Baltes
International Electron Devices Meeting. IEDM Technical Digest, 895-898, 1997
791997
Thermally actuated CMOS micromirrors
J Bühler, J Funk, O Paul, FP Steiner, H Baltes
Sensors and Actuators A: Physical 47 (1-3), 572-575, 1995
791995
Two-dimensional integrated gas flow sensors by CMOS IC technology
J Robadey, O Paul, H Baltes
Journal of Micromechanics and Microengineering 5 (3), 243, 1995
741995
Novel fully CMOS-compatible vacuum sensor
O Paul, H Baltes
Sensors and Actuators A: Physical 46 (1-3), 143-146, 1995
741995
Surface micromachining by sacrificial aluminium etching
D Westberg, O Paul, GI Andersson, H Baltes
Journal of Micromechanics and Microengineering 6 (4), 376, 1996
701996
CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording
K Seidl, S Herwik, T Torfs, HP Neves, O Paul, P Ruther
Journal of Microelectromechanical Systems 20 (6), 1439-1448, 2011
692011
Mechanical reliability of MEMS-structures under shock load
U Wagner, J Franz, M Schweiker, W Bernhard, R Müller-Fiedler, B Michel, ...
Microelectronics Reliability 41 (9-10), 1657-1662, 2001
692001
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