Low-temperature method for thermochromic high ordered VO2 phase formation V Melnik, I Khatsevych, V Kladko, A Kuchuk, V Nikirin, B Romanyuk
Materials Letters 68, 215-217, 2012
82 2012 Oxidation of tungsten surface with reactive oxygen plasma A Romanyuk, V Melnik, P Oelhafen
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2005
37 2005 Si Segregation into Pr2O3 and La2O3 high-k gate oxides G Lippert, J Dąbrowski, V Melnik, R Sorge, C Wenger, P Zaumseil, ...
Applied Physics Letters 86 (4), 2005
34 2005 Structural transformation and functional properties of vanadium oxide films after low-temperature annealing Y Goltvyanskyi, I Khatsevych, A Kuchuk, V Kladko, V Melnik, P Lytvyn, ...
Thin Solid Films 564, 179-185, 2014
30 2014 Light emission from nanocrystalline silicon clusters embedded in silicon dioxide: Role of the suboxide states A Romanyuk, V Melnik, Y Olikh, J Biskupek, U Kaiser, M Feneberg, ...
Journal of Luminescence 130 (1), 87-91, 2010
28 2010 Use of ultrasound for metal cluster engineering in ion implanted silicon oxide A Romanyuk, P Oelhafen, R Kurps, V Melnik
Applied physics letters 90 (1), 2007
28 2007 Influence of in situ ultrasound treatment during ion implantation on formation of silver nanoparticles in silica A Romanyuk, V Spassov, V Melnik
Journal of applied physics 99 (3), 2006
28 2006 Transformation of the structure of silicon oxide during the formation of Si nanoinclusions under thermal annealings IP Lisovskyy, MV Voitovych, AV Sarikov, VG Litovchenko, AB Romanyuk, ...
Ukr J Phys 54 (4), 383-90, 2009
23 2009 Thermal stability of films grown on Si(100) substrate A Goryachko, JP Liu, D Krüger, HJ Osten, E Bugiel, R Kurps, V Melnik
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 20 (6 …, 2002
22 2002 Influence of N2/H2 plasma treatment on chemical vapor deposited TiN multilayer structures for advanced CMOS technologies V Melnik, D Wolanski, E Bugiel, A Goryachko, S Chernjavski, D Krüger
Materials Science and Engineering: B 102 (1-3), 358-361, 2003
21 2003 Influence of in situ ultrasound treatment during ion implantation on amorphization and junction formation in silicon D Krüger, B Romanyuk, V Melnik, Y Olikh, R Kurps
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002
20 2002 Diffusion and segregation of shallow As and Sb junctions in silicon D Krüger, H Rücker, B Heinemann, V Melnik, R Kurps, D Bolze
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2004
19 2004 Structure of the modified surface layer formed by ion bombardment of SiO2 films IP Lisovskii, VG Litovchenko, VB Lozinskii, VP Melnik, SI Frolov
Thin Solid Films 247 (2), 264-270, 1994
17 1994 Enhanced relaxation of SiGe layers by He implantation supported by in situ ultrasonic treatments B Romanjuk, V Kladko, V Melnik, V Popov, V Yukhymchuk, A Gudymenko, ...
Materials science in semiconductor processing 8 (1-3), 171-175, 2005
14 2005 Formation of shallow source/drain extensions for metal–oxide–semiconductor field-effect-transistors by antimony implantation H Rücker, B Heinemann, R Barth, D Bolze, V Melnik, D Krüger, R Kurps
Applied physics letters 82 (5), 826-828, 2003
14 2003 Characteristics of silicon p–n junction formed by ion implantation with in situ ultrasound treatment VP Melnik, YM Olikh, VG Popov, BM Romanyuk, YV Goltvyanskii, ...
Materials Science and Engineering: B 124, 327-330, 2005
13 2005 Effects of low temperature anneals on the photovoltage in Si nanocrystals O Korotchenkov, A Podolian, V Kuryliuk, B Romanyuk, V Melnik, ...
Journal of Applied Physics 111 (6), 2012
12 2012 Effects of various Co/TiN and Co/Ti layer stacks and the salicide rapid thermal process conditions on cobalt silicide formation S Buschbaum, O Fursenko, D Bolze, D Wolansky, V Melnik, J Nieß, ...
Microelectronic engineering 76 (1-4), 311-317, 2004
12 2004 Stimulated oxygen impurity gettering under ultra-shallow junction formation in silicon O Oberemok, V Kladko, V Litovchenko, B Romanyuk, V Popov, V Melnik, ...
Semiconductor Science and Technology 29 (5), 055008, 2014
11 2014 Effect of low-temperature treatments on photoluminescence enhancement of ion-beam synthesized Si nanocrystals in SiO₂ matrix I Khatsevich, V Melnik, V Popov, B Romanyuk, V Fedulov
Semiconductor Physics Quantum Electronics & Optoelectronics, 2008
10 2008