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Ted Moise
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Hardmask designs for dry etching FeRAM capacitor stacks
T Moise, SR Gilbert, SR Summerfelt, G Xing, L Colombo
US Patent 6,534,809, 2003
3442003
A monolithic 4-bit 2-Gsps resonant tunneling analog-to-digital converter
TPE Broekaert, B Brar, JPA van der Wagt, AC Seabaugh, FJ Morris, ...
IEEE Journal of Solid-State Circuits 33 (9), 1342-1349, 1998
2611998
Integrated circuit and method
TS Moise, G Xing, M Visokay, JF Gaynor, SR Gilbert, F Celii, ...
US Patent 6,211,035, 2001
2592001
Quantitative simulation of a resonant tunneling diode
RC Bowen, G Klimeck, RK Lake, WR Frensley, T Moise
Journal of applied physics 81 (7), 3207-3213, 1997
2041997
Quantum device simulation with a generalized tunneling formula
G Klimeck, R Lake, RC Bowen, WR Frensley, TS Moise
Applied physics letters 67 (17), 2539-2541, 1995
1801995
A 64-Mb embedded FRAM utilizing a 130-nm 5LM Cu/FSG logic process
HP McAdams, R Acklin, T Blake, XH Du, J Eliason, J Fong, WF Kraus, ...
IEEE Journal of Solid-State Circuits 39 (4), 667-677, 2004
1242004
Integrated circuit and method
TS Moise, G Xing, M Visokay, JF Gaynor, SR Gilbert, F Celii, ...
US Patent 6,444,542, 2002
1152002
Reliability properties of low-voltage ferroelectric capacitors and memory arrays
JA Rodriguez, K Remack, K Boku, KR Udayakumar, S Aggarwal, ...
IEEE Transactions on Device and Materials Reliability 4 (3), 436-449, 2004
1012004
Sputtering process for the conformal deposition of a metallization or insulating layer
PC Van Buskirk, MW Russell, DJ Vestyck, SR Summerfelt, TS Moise
US Patent 6,100,200, 2000
922000
Fabricating an embedded ferroelectric memory cell
T Moise, S Summerfelt, E Zielinski, S Johnson
US Patent 6,734,477, 2004
872004
Method of fabricating a ferroelectric memory cell
SR Summerfelt, TS Moise, G Xing, L Colombo, T Sakoda, SR Gilbert, ...
US Patent 6,548,343, 2003
842003
Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch
SR Summerfelt, G Xing, L Colombo, S Aggarwal, TS Moise IV
US Patent 6,635,498, 2003
822003
Ferroelectric capacitor stack etch cleaning methods
SR Summerfelt, LH Hall, KR Udayakumar, TS Moise IV
US Patent 7,220,600, 2007
772007
Demonstration of a 4 Mb, high density ferroelectric memory embedded within a 130 nm, 5 LM Cu/FSG logic process
TS Moise, SR Summerfelt, H McAdams, S Aggarwal, KR Udayakumar, ...
Digest. International Electron Devices Meeting,, 535-538, 2002
682002
SOC CMOS technology for personal internet products
D Buss, BL Evans, J Bellay, W Krenik, B Haroun, D Leipold, K Maggio, ...
IEEE Transactions on Electron Devices 50 (3), 546-556, 2003
672003
Magnitude, origin, and evolution of piezoelectric optical nonlinearities in strained [111] B InGaAs/GaAs quantum wells
AN Cartwright, DS McCallum, TF Boggess, AL Smirl, TS Moise, LJ Guido, ...
Journal of applied physics 73 (11), 7767-7774, 1993
661993
Hydrogen barrier for protecting ferroelectric capacitors in a semiconductor device and methods for fabricating the same
KR Udayakumar, MG Albrecht, TS Moise IV, SR Summerfelt, S Aggarwal, ...
US Patent 6,984,857, 2006
642006
Optically switched resonant tunneling diodes
TS Moise, YC Kao, LD Garrett, JC Campbell
Applied physics letters 66 (9), 1104-1106, 1995
611995
Reliability of Ferroelectric Random Access memory embedded within 130nm CMOS
J Rodriguez, K Remack, J Gertas, L Wang, C Zhou, K Boku, ...
2010 IEEE International Reliability Physics Symposium, 750-758, 2010
602010
Method of forming an FeRAM having a multi-layer hard mask and patterning thereof
SR Summerfelt, S Aggarwal, L Colombo, TS Moise IV, JS Martin
US Patent 6,828,161, 2004
572004
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