Yan Qiao
Title
Cited by
Cited by
Year
Scheduling of single-arm cluster tools for an atomic layer deposition process with residency time constraints
FJ Yang, NQ Wu, Y Qiao, MC Zhou, ZW Li
IEEE Transactions on Systems, Man, and Cybernetics: Systems 47 (3), 502-516, 2016
972016
Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation
Y Qiao, NQ Wu, MC Zhou
IEEE Transactions on Semiconductor manufacturing 25 (3), 432-446, 2012
812012
Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation
Y Qiao, NQ Wu, MC Zhou
IEEE Transactions on Automation Science and Engineering 9 (3), 564-577, 2012
782012
A Petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting
Y Qiao, NQ Wu, MC Zhou
IEEE Transactions on Semiconductor manufacturing 26 (1), 100-110, 2012
772012
Petri net-based optimal one-wafer scheduling of single-arm multi-cluster tools in semiconductor manufacturing
QH Zhu, NQ Wu, Y Qiao, MC Zhou
IEEE Transactions on Semiconductor Manufacturing 26 (4), 578-591, 2013
722013
Scheduling of dual-arm cluster tools with wafer revisiting and residency time constraints
Y Qiao, N Wu, MC Zhou
IEEE Transactions on Industrial Informatics 10 (1), 286-300, 2013
682013
Petri net modeling and scheduling of a close-down process for time-constrained single-arm cluster tools
QH Zhu, MC Zhou, Y Qiao, NQ Wu
IEEE Transactions on Systems, Man, and Cybernetics: Systems 48 (3), 389-400, 2016
622016
Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets
F Yang, N Wu, Y Qiao, R Su
IEEE/CAA Journal of Automatica Sinica 5 (1), 270-280, 2017
542017
Scheduling of single-arm multi-cluster tools with wafer residency time constraints in semiconductor manufacturing
QH Zhu, NQ Wu, Y Qiao, MC Zhou
IEEE Transactions on Semiconductor Manufacturing 28 (1), 117-125, 2014
532014
Wafer sojourn time fluctuation analysis of time-constrained dual-arm cluster tools with wafer revisiting and activity time variation
Y Qiao, NQ Wu, FJ Yang, MC Zhou, QH Zhu
IEEE Transactions on Systems, Man, and Cybernetics: Systems 48 (4), 622-636, 2016
502016
Scheduling cluster tools in semiconductor manufacturing: Recent advances and challenges
CR Pan, MC Zhou, Y Qiao, NQ Wu
IEEE transactions on automation science and engineering 15 (2), 586-601, 2017
462017
Petri net-based polynomially complex approach to optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in semiconductor manufacturing
FJ Yang, NQ Wu, Y Qiao, MC Zhou
IEEE Transactions on Systems, Man, and Cybernetics: Systems 44 (12), 1598-1610, 2014
452014
Petri net-based optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in wafer fabrication
FJ Yang, NQ Wu, Y Qiao, MC Zhou
IEEE Transactions on Semiconductor Manufacturing 27 (2), 192-203, 2014
452014
Response policies to process module failure in single-arm cluster tools subject to wafer residency time constraints
Y Qiao, CR Pan, NQ Wu, MC Zhou
IEEE Transactions on Automation Science and Engineering 12 (3), 1125-1139, 2014
422014
Optimal scheduling of complex multi-cluster tools based on timed resource-oriented Petri nets
Q Zhu, N Wu, Y Qiao, M Zhou
IEEE Access 4, 2096-2109, 2016
402016
Schedulability and scheduling analysis of dual-arm cluster tools with wafer revisiting and residency time constraints based on a novel schedule
Y Qiao, NQ Wu, MC Zhou
IEEE Transactions on Systems, Man, and Cybernetics: Systems 45 (3), 472-484, 2014
372014
Scheduling and control of startup process for single-arm cluster tools with residency time constraints
Y Qiao, MC Zhou, NQ Wu, QH Zhu
IEEE Transactions on Control Systems Technology 25 (4), 1243-1256, 2016
312016
How to respond to process module failure in residency time-constrained single-arm cluster tools
Y Qiao, NQ Wu, CR Pan, MC Zhou
IEEE Transactions on Semiconductor Manufacturing 27 (4), 462-474, 2014
312014
Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
Y Qiao, NQ Wu, QH Zhu, LP Bai
Computers & Operations Research 53, 252-260, 2015
282015
A novel algorithm for wafer sojourn time analysis of single-arm cluster tools with wafer residency time constraints and activity time variation
CR Pan, Y Qiao, NQ Wu, MC Zhou
IEEE Transactions on Systems, Man, and Cybernetics: Systems 45 (5), 805-818, 2014
262014
The system can't perform the operation now. Try again later.
Articles 1–20