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David Zheng
David Zheng
University of Alberta
Verified email at ualberta.ca
Title
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Year
Study of development processes for ZEP-520 as a high-resolution positive and negative tone electron beam lithography resist
MA Mohammad, K Koshelev, T Fito, DAZ Zheng, M Stepanova, S Dew
Japanese Journal of Applied Physics 51 (6S), 06FC05, 2012
502012
Developer-free direct patterning of PMMA/ZEP 520A by low voltage electron beam lithography
D Ai Zhi Zheng, M Ali Mohammad, S Kelly Dew, M Stepanova
Journal of Vacuum Science & Technology B 29 (6), 2011
62011
Developer-free direct patterning of PMMA/ZEP 520A by low voltage electron beam lithography 06F303
DA Zhi Zheng, M Ali Mohammad, S Kelly Dew, M Stepanova
Journal of Vacuum Science and Technology-Section B 29 (6), 2011
2011
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Articles 1–3