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Yi-Chung Lin
Yi-Chung Lin
Verified email at andrew.cmu.edu
Title
Cited by
Cited by
Year
Resonant microelectromechanical receiver
A Kochhar, ME Galanko, M Soliman, H Abdelsalam, L Colombo, YC Lin, ...
Journal of Microelectromechanical Systems 28 (3), 327-343, 2019
372019
Sidewall metallization on CMOS MEMS by platinum ALD patterning
YC Lin, VPJ Chung, S Santhanam, T Mukherjee, GK Fedder
Journal of Microelectromechanical Systems 29 (5), 978-983, 2020
102020
High-g capacitive accelerometer arrays with low bias instability
GK Fedder, VPJ Chung, MG Guney, X Li, YC Lin, S Santhanam, ...
2020 IEEE/ION Position, Location and Navigation Symposium (PLANS), 9-15, 2020
62020
Stress-and-temperature-induced drift compensation on a high dynamic range accelerometer array using deep neural networks
VPJ Chung, YC Lin, X Li, MG Guney, J Paramesh, T Mukherjee, ...
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
52021
ALD titania sidewalls on a CMOS-MEMS resonator oscillator and effects on Resonant frequency drift
YC Lin, MG Guney, GK Fedder
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019
42019
Lateral flexure contact on CMOS MEMS electrothermal metal-metal contact switch by platinum ALD sidewall patterning
YC Lin, S Yen, T Mukherjee, GK Fedder
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
22021
A SINGLE-CRYSTAL SILICON RESONATOR FOR AM DEMODULATION WITH ADDED SECONDHARMONIC MODULATION
ME Galanko, YC Lin, T Mukherjee, GK Fedder
2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest, 346-349, 2018
22018
Patterned ALD sidewall metallization on CMOS MEMS and applications
YC Lin
Carnegie Mellon University, 2022
2022
Improvement of thin film tensile testing technology using process integrated specimen and considering its out-of-plane deformation
YC Lin, CL Cheng, W Fang
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
2015
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Articles 1–9