| Optimization of poly-di-methyl-siloxane (PDMS) substrates for studying cellular adhesion and motility D Fuard, T Tzvetkova-Chevolleau, S Decossas, P Tracqui, P Schiavone Microelectronic Engineering 85 (5-6), 1289-1293, 2008 | 505 | 2008 |
| The motility of normal and cancer cells in response to the combined influence of the substrate rigidity and anisotropic microstructure T Tzvetkova-Chevolleau, A Stéphanou, D Fuard, J Ohayon, P Schiavone, ... Biomaterials 29 (10), 1541-1551, 2008 | 192 | 2008 |
| Unbiased line width roughness measurements with critical dimension scanning electron microscopy and critical dimension atomic force microscopy L Azarnouche, E Pargon, K Menguelti, M Fouchier, D Fuard, P Gouraud, ... Journal of Applied Physics 111 (8), 2012 | 54 | 2012 |
| High density plasma etching of low dielectric polymers in oxygen-based chemistries D Fuard, O Joubert, L Vallier, M Bonvalot Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001 | 46 | 2001 |
| Etch mechanisms of low dielectric constant polymers in high density plasmas: Impact of charging effects on profile distortion during the etching process D Fuard, O Joubert, L Vallier, M Assous, P Berruyer, R Blanc Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001 | 41 | 2001 |
| Assessment of different simplified resist models D Fuard, M Besacier, P Schiavone Optical Microlithography XV 4691, 1266-1277, 2002 | 38 | 2002 |
| Assessment of different simplified resist models D Fuard, M Besacier, P Schiavone Optical Microlithography XV 4691, 1266-1277, 2002 | 38 | 2002 |
| Measurement of residual thickness using scatterometry D Fuard, C Perret, V Farys, C Gourgon, P Schiavone Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2005 | 32 | 2005 |
| Intracellular stresses in patterned cell assemblies M Moussus, C der Loughian, D Fuard, M Courçon, D Gulino-Debrac, ... Soft matter 10 (14), 2414-2423, 2014 | 31 | 2014 |
| Validity of the diffused aerial image model: an assessment based on multiple test cases D Fuard, M Besacier, P Schiavone Optical Microlithography XVI 5040, 1536-1543, 2003 | 26 | 2003 |
| Validity of the diffused aerial image model: an assessment based on multiple test cases D Fuard, M Besacier, P Schiavone Optical Microlithography XVI 5040, 1536-1543, 2003 | 26 | 2003 |
| Microscale adhesion patterns for the precise localization of amoeba T Tzvetkova-Chevolleau, E Yoxall, D Fuard, F Bruckert, P Schiavone, ... Microelectronic engineering 86 (4-6), 1485-1487, 2009 | 12 | 2009 |
| An inverse ellipsometric problem for thin film characterization: comparison of different optimization methods A Akbalık, S Soulan, JH Tortai, D Fuard, I Kone, J Hazart, P Schiavone Metrology, Inspection, and Process Control for Microlithography XXIII 7272 …, 2009 | 12 | 2009 |
| Process for making a gate for a short channel CMOS transistor structure O Joubert, G Cunge, J Foucher, D Fuard, M Bonvalot, L Vallier US Patent 6,818,488, 2004 | 10 | 2004 |
| Process for making a gate for a short channel CMOS transistor structure O Joubert, G Cunge, J Foucher, D Fuard, M Bonvalot, L Vallier US Patent 6,818,488, 2004 | 10 | 2004 |
| Process for the anisotropic etching of an organic dielectric polymer material by a plasma gas and application in microelectronics O Joubert, D Fuard US Patent 6,326,302, 2001 | 8 | 2001 |
| Poly-l-lysine/Laminin Surface Coating Reverses Glial Cell Mechanosensitivity on Stiffness-Patterned Hydrogels C Tomba, C Migdal, D Fuard, C Villard, A Nicolas ACS Applied Bio Materials 5 (4), 1552-1563, 2022 | 6 | 2022 |
| Plasma polymerized methylsilane. III. Process optimization for 193 nm lithography applications O Joubert, D Fuard, C Monget, T Weidman Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 6 | 2000 |
| Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films J Resende, D Fuard, D Le Cunff, JH Tortai, B Pelissier Materials Chemistry and Physics 259, 124000, 2021 | 5 | 2021 |
| Rapid mask prototyping for microfluidics BGC Maisonneuve, T Honegger, J Cordeiro, O Lecarme, T Thiry, D Fuard, ... Biomicrofluidics 10 (2), 2016 | 5 | 2016 |
olivier joubertdirecteur de recherche cnrs, grenobleVerified email at cea.fr
