| Modeling spray pyrolysis deposition L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ... Proceedings of the world congress on engineering 2, 987-992, 2013 | 77 | 2013 |
| Methods of simulating thin film deposition using spray pyrolysis techniques L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ... Microelectronic Engineering 117, 57-66, 2014 | 71 | 2014 |
| Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors L Filipovic, S Selberherr Sensors 15 (4), 7206-7227, 2015 | 68 | 2015 |
| Modeling and simulation of novel semiconducting metal oxide gas sensors for wearable devices A Lahlalia, L Filipovic, S Selberherr IEEE Sensors Journal 18 (5), 1960-1970, 2018 | 33 | 2018 |
| Topography simulation of novel processing techniques L Filipovic | 33 | 2012 |
| System-on-chip SMO gas sensor integration in advanced CMOS technology L Filipovic, A Lahlalia Journal of The Electrochemical Society 165 (16), B862, 2018 | 31 | 2018 |
| Modeling of gate stack patterning for advanced technology nodes: A review X Klemenschits, S Selberherr, L Filipovic Micromachines 9 (12), 631, 2018 | 31 | 2018 |
| A method for simulating spray pyrolysis deposition in the level set framework L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ... Eng. Lett 21 (4), 224-240, 2013 | 22 | 2013 |
| Thermo-electro-mechanical simulation of semiconductor metal oxide gas sensors L Filipovic, S Selberherr Materials 12 (15), 2410, 2019 | 21 | 2019 |
| A method for simulating the influence of grain boundaries and material interfaces on electromigration L Filipovic Microelectronics Reliability 97, 38-52, 2019 | 18 | 2019 |
| Improved sensing capability of integrated semiconducting metal oxide gas sensor devices A Lahlalia, O Le Neel, R Shankar, S Selberherr, L Filipovic Sensors 19 (2), 374, 2019 | 17 | 2019 |
| Electro-thermal simulation & characterization of a microheater for SMO gas sensors A Lahlalia, O Le Neel, R Shankar, SY Kam, L Filipovic Journal of Microelectromechanical Systems 27 (3), 529-537, 2018 | 17 | 2018 |
| Perspective of 2D integrated electronic circuits: Scientific pipe dream or disruptive technology? M Waltl, T Knobloch, K Tselios, L Filipovic, B Stampfer, Y Hernandez, ... Advanced Materials, 2201082, 2022 | 15 | 2022 |
| Modeling the growth of tin dioxide using spray pyrolysis deposition for gas sensor applications L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ... IEEE transactions on semiconductor manufacturing 27 (2), 269-277, 2014 | 15 | 2014 |
| Improving stability in two-dimensional transistors with amorphous gate oxides by Fermi-level tuning T Knobloch, B Uzlu, YY Illarionov, Z Wang, M Otto, L Filipovic, M Waltl, ... Nature Electronics 5 (6), 356-366, 2022 | 14 | 2022 |
| Intrinsic stress analysis of tungsten-lined open TSVs L Filipovic, AP Singulani, F Roger, S Carniello, S Selberherr Microelectronics Reliability 55 (9-10), 1843-1848, 2015 | 14 | 2015 |
| Three-dimensional simulation of focused ion beam processing using the level set method O Ertl, L Filipović, S Selberherr 2010 International Conference on Simulation of Semiconductor Processes and …, 2010 | 14 | 2010 |
| The effects of etching and deposition on the performance and stress evolution of open through silicon vias L Filipovic, S Selberherr Microelectronics Reliability 54 (9-10), 1953-1958, 2014 | 12 | 2014 |
| Electro-thermal-mechanical modeling of gas sensor hotplates R Coppeta, A Lahlalia, D Kozic, R Hammer, J Riedler, G Toschkoff, ... Sensor Systems Simulations: From Concept to Solution, 17-72, 2020 | 11 | 2020 |
| Coupled simulation to determine the impact of across wafer variations in oxide PECVD on electrical and reliability parameters of through-silicon vias E Baer, P Evanschitzky, J Lorenz, F Roger, R Minixhofer, L Filipovic, ... Microelectronic Engineering 137, 141-145, 2015 | 9 | 2015 |
