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Rebecca L (Becky) Peterson
Rebecca L (Becky) Peterson
Other namesR L Peterson, Rebecca L Peterson
Associate Professor of Electrical Engineering and Computer Science and Mat. Science & Eng.
Verified email at umich.edu - Homepage
Title
Cited by
Cited by
Year
Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’process
KK Banger, Y Yamashita, K Mori, RL Peterson, T Leedham, J Rickard, ...
Nature Materials 10 (1), 45-50, 2010
11022010
Harvesting traffic-induced vibrations for structural health monitoring of bridges
TV Galchev, J McCullagh, RL Peterson, K Najafi
Journal of Micromechanics and Microengineering 21 (10), 104005, 2011
1832011
Fused-Silica Micro Birdbath Resonator Gyroscope (micro-BRG)
JY Cho, JK Woo, J Yan, RL Peterson, K Najafi
Microelectromechanical Systems, Journal of 23 (1), 66-77, 2014
133*2014
Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting
EE Aktakka, RL Peterson, K Najafi
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
1292011
Microsystems for energy harvesting
K Najafi, T Galchev, EE Aktakka, RL Peterson, J McCullagh
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
972011
High Performance, Low temperature Solution-Processed Barium and Strontium doped Oxide Thin Film Transistors
KK Banger, RL Peterson, K Mori, Y Yamashita, T Leedham, H Sirringhaus
Chemistry of Materials 26, 1195-1203, 2013
782013
Long-term testing of a vibration harvesting system for the structural health monitoring of bridges
JJ McCullagh, T Galchev, RL Peterson, R Gordenker, Y Zhang, J Lynch, ...
Sensors and Actuators A: Physical 217, 139-150, 2014
772014
High aspect ratio deep silicon etching
KJ Owen, B VanDerElzen, RL Peterson, K Najafi
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International …, 2012
752012
3-Dimensional Blow Torch-Molding of Fused Silica Microstructures
JY Cho, J Yan, JA Gregory, HW Eberhart, RL Peterson, K Najafi
IEEE Journal of Microelectromechanical Systems 22 (6), 1276-1284, 2013
742013
A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon
EE Aktakka, RL Peterson, K Najafi
Electron Devices Meeting (IEDM), 2010 IEEE International, 31.5.1-31.5.4, 2010
702010
Interfacial reactions of titanium/gold ohmic contacts with Sn-doped β-Ga₂O₃
MH Lee, RL Peterson
APL Materials 7 (2), 022524, 2019
682019
Monolithic integration of high-voltage thin-film electronics on low-voltage silicon integrated circuits using a solution process
Y Son, B Frost, Y Zhao, RL Peterson
Nature Electronics 2 (11), 540-548, 2019
672019
A self-supplied inertial piezoelectric energy harvester with power-management IC
EE Aktakka, RL Peterson, K Najafi
2011 IEEE International Solid-State Circuits Conference, 120-121, 2011
672011
Low-temperature sintering of in-plane self-assembled ZnO nanorods for solution-processed high-performance thin film transistors
B Sun, RL Peterson, H Sirringhaus, K Mori
The Journal of Physical Chemistry C 111 (51), 18831-18835, 2007
672007
Fully-depleted strained-Si on insulator NMOSFETs without relaxed SiGe buffers
H Yin, KD Hobart, RL Peterson, FJ Kub, SR Shieh, TS Duffy, JC Sturm
Electron Devices Meeting, 2003. IEDM'03 Technical Digest. IEEE International …, 2003
652003
High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding
J Cho, J Yan, JA Gregory, H Eberhart, RL Peterson, K Najafi
Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International …, 2013
612013
Molybdenum as a contact material in zinc tin oxide thin film transistors
W Hu, RL Peterson
Applied Physics Letters 104 (19), 192105, 2014
602014
A CPW T-resonator technique for electrical characterization of microwave substrates
RL Peterson, RF Drayton
IEEE Microwave and Wireless Components Letters 12, 90, 2002
562002
A CPW T-resonator technique for electrical characterization of microwave substrates
RL Peterson, RF Drayton
ARFTG Conference Digest-Spring, 57th 39, 59-63, 2001
562001
Microsystem device and methods for fabricating the same
K Najafi, RL Peterson, JY Cho, Z Cao, G He, J Gregory, Y Yuan
US Patent 9,778,039, 2017
552017
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