Optically induced rotation of anisotropic micro‐objects fabricated by surface micromachining E Higurashi, H Ukita, H Tanaka, O Ohguchi Applied Physics Letters 64 (17), 2209-2210, 1994 | 267 | 1994 |
Low-temperature bonding of laser diode chips on silicon substrates using plasma activation of Au films E Higurashi, T Imamura, T Suga, R Sawada IEEE Photonics Technology Letters 19 (24), 1994-1996, 2007 | 127 | 2007 |
Au–Au surface-activated bonding and its application to optical microsensors with 3-D structure E Higurashi, D Chino, T Suga, R Sawada IEEE Journal of Selected Topics in Quantum Electronics 15 (5), 1500-1505, 2009 | 104 | 2009 |
An integrated laser blood flowmeter E Higurashi, R Sawada, T Ito Journal of lightwave technology 21 (3), 591-595, 2003 | 101 | 2003 |
Optically induced rotation of dissymmetrically shaped fluorinated polyimide micro-objects in optical traps E Higurashi, O Ohguchi, T Tamamura, H Ukita, R Sawada Journal of Applied Physics 82 (6), 2773-2779, 1997 | 95 | 1997 |
Optically induced angular alignment of trapped birefringent micro-objects by linearly polarized light E Higurashi, R Sawada, T Ito Physical Review E 59 (3), 3676, 1999 | 80 | 1999 |
Room-temperature bonding of vertical-cavity surface-emitting laser chips on Si substrates using Au microbumps in ambient air R Takigawa, E Higurashi, T Suga, R Sawada Applied Physics Express 1 (11), 112201, 2008 | 74 | 2008 |
Micro-mirror apparatus and production method therefor R Sawada, E Higurashi, T Maruno US Patent 6,431,714, 2002 | 66 | 2002 |
Integrated micro-displacement sensor that measures tilting angle and linear movement of an external mirror I Ishikawa, R Sawada, E Higurashi, S Sanada, D Chino Sensors and Actuators A: Physical 138 (2), 269-275, 2007 | 52 | 2007 |
Organism information detection device and sphygmomanometer Y Uenishi, E Higurashi, K Naganuma, S Sudo, J Shimada, K Aihara, ... US Patent App. 10/570,956, 2007 | 52 | 2007 |
Optically induced rotation of a trapped micro-object about an axis perpendicular to the laser beam axis E Higurashi, R Sawada, T Ito Applied physics letters 72 (23), 2951-2953, 1998 | 52 | 1998 |
A three-dimensional MEMS optical switching module having 100 input and 100 output ports T Yamamoto, J Yamaguchi, N Takeuchi, A Shimizu, E Higurashi, ... IEEE Photonics Technology Letters 15 (10), 1360-1362, 2003 | 50 | 2003 |
Integrated microlaser Doppler velocimeter T Ito, R Sawada, E Higurashi Journal of lightwave technology 17 (1), 30-34, 1999 | 49 | 1999 |
Passive Alignment and Mounting of LiNbO Waveguide Chips on Si Substrates by Low-Temperature Solid-State Bonding of Au R Takigawa, E Higurashi, T Suga, T Kawanishi IEEE Journal of Selected Topics in Quantum Electronics 17 (3), 652-658, 2011 | 45 | 2011 |
Low-temperature hermetic packaging for microsystems using Au–Au surface-activated bonding at atmospheric pressure S Yamamoto, E Higurashi, T Suga, R Sawada Journal of Micromechanics and Microengineering 22 (5), 055026, 2012 | 43 | 2012 |
Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection E Higurashi, R Sawada, T Ito Applied optics 38 (9), 1746-1751, 1999 | 43 | 1999 |
Micro-encoder based on higher-order diffracted light interference E Higurashi, R Sawada Journal of Micromechanics and Microengineering 15 (8), 1459, 2005 | 41 | 2005 |
Optically induced angular alignment of birefringent micro-objects by linear polarization E Higurashi, R Sawada, T Ito Applied physics letters 73 (21), 3034-3036, 1998 | 39 | 1998 |
Integrated laser Doppler blood flowmeter designed to enable wafer-level packaging Y Kimura, M Goma, A Onoe, E Higurashi, R Sawada IEEE Transactions on Biomedical Engineering 57 (8), 2026-2033, 2010 | 38 | 2010 |
Hybrid microlaser encoder R Sawada, E Higurashi, Y Jin Journal of lightwave technology 21 (3), 815, 2003 | 38 | 2003 |