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Laurent Gaëtan Michaud
Laurent Gaëtan Michaud
Process development engineer, EV Group
Verified email at cea.fr
Title
Cited by
Cited by
Year
Elaboration and characterization of a 200 mm stretchable and flexible ultra-thin semi-conductor film
LG Michaud, C Castan, M Zussy, P Montméat, VH Mareau, L Gonon, ...
Nanotechnology 31 (14), 145302, 2020
62020
Aluminium-nitride thin-films on polymer substrates obtained by adhesive bonding
E Azrak, LG Michaud, A Reinhardt, S Tardif, M Bousquet, N Vaxelaire, ...
ECS Journal of Solid State Science and Technology 10 (6), 064001, 2021
32021
Large scale integration of functional radio‐frequency flexible MEMS under large mechanical strain
E Azrak, L Michaud, J Richy, A Reinhardt, S Tardif, J Eymery, M Bousquet, ...
Advanced Functional Materials 33 (4), 2205404, 2023
22023
Stress Engineering in Germanium-Silicon Heterostructure Using Surface Activated Hot Bonding
Q Lomonaco, K Abadie, C Morales, LG Michaud, J Richy, S Moreau, ...
ECS Transactions 109 (4), 277, 2022
22022
Transfer of an ultrathin single-crystal silicon film from a silicon-on-insulator to a polymer
LG Michaud, E Azrak, C Castan, F Fournel, F Rieutord, S Tardif, ...
Materials Today Nano 13, 100107, 2021
22021
Edge Bonding Voids Management Using Humid Helium Bonding Atmosphere
F Fournel, V Larrey, C Morales, LG Michaud
ECS Transactions 112 (3), 15, 2023
12023
(First Best Paper Award) Vacuum Quality Impact on Covalent Bonding
K Abadie, Q Lomonaco, L Michaud, F Fournel, C Morales
Electrochemical Society Meeting Abstracts 244, 1600-1600, 2023
2023
Inline Bondwave Monitoring for Direct Bonding, Process Optimization and Impact on Post-Bond Distortion
LG Michaud, F Fournel, C Morales, M Schmidbauer, K Abadie, T Plach, ...
ECS Transactions 112 (3), 23, 2023
2023
Vacuum Quality Impact on Covalent Bonding
K Abadie, Q Lomonaco, L Michaud, F Fournel, C Morales
ECS Transactions 112 (3), 125, 2023
2023
Thin-film transfer method
F Fournel, L Michaud, P Montmeat
US Patent 11,551,976, 2023
2023
Method of transferring a thin film from a substrate to a flexible support
L Michaud, C Castan, F Fournel, P Montmeat
US Patent 11,244,971, 2022
2022
Elaboration and transfer of tensile strained thin films
L Michaud
Université Grenoble Alpes [2020-....], 2021
2021
Elaboration et transfert de films ultra-contraints
L Michaud
Université Grenoble Alpes, 2021
2021
Highly Strained Silicon on Polymer Obtained By Temporary Polymer Wafer Bonding
LG Michaud, C Castan, P Montméat, E Azrak, N Nikitskiy, F Fournel, ...
PRiME 2020 (ECS, ECSJ, & KECS Joint Meeting), 2020
2020
PROCEDE DE TRANSFERT DE FILM MINCE
F FOURNEL, L MICHAUD, P MONTMEAT
FR Patent 3,087,297, 2018
2018
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