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Yi Xu
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Enhanced Inversion Mobility on 4H-SiC Using Phosphorus and Nitrogen Interface Passivation
G Liu, AC Ahyi, Y Xu, T Isaacs-Smith, YK Sharma, JR Williams, ...
IEEE Electron Device Letters 34 (2), 181-183, 2013
1292013
Effects of Mg on the electrical characteristics and thermal stability of MgxZn1− xO thin film transistors
CJ Ku, Z Duan, PI Reyes, Y Lu, Y Xu, CL Hsueh, E Garfunkel
Applied Physics Letters 98 (12), 2011
1272011
High-mobility stable 4H-SiC MOSFETs using a thin PSG interfacial passivation layer
YK Sharma, AC Ahyi, T Isaacs-Smith, A Modic, M Park, Y Xu, ...
IEEE Electron Device Letters 34 (2), 175-177, 2013
942013
Reduction of persistent photoconductivity in ZnO thin film transistor-based UV photodetector
P Ivanoff Reyes, CJ Ku, Z Duan, Y Xu, E Garfunkel, Y Lu
Applied Physics Letters 101 (3), 2012
932012
Effects of Mg composition on open circuit voltage of Cu2O–MgxZn1− xO heterojunction solar cells
Z Duan, A Du Pasquier, Y Lu, Y Xu, E Garfunkel
Solar energy materials and solar cells 96, 292-297, 2012
892012
Atomic state and characterization of nitrogen at the SiC/SiO2 interface
Y Xu, X Zhu, HD Lee, C Xu, SM Shubeita, AC Ahyi, Y Sharma, ...
Journal of Applied Physics 115 (3), 2014
782014
Kinetics of nitrogen incorporation at the SiO2/4H-SiC interface during an NO passivation
Z Chen, Y Xu, E Garfunkel, LC Feldman, T Buyuklimanli, W Ou, J Serfass, ...
Applied surface science 317, 593-597, 2014
302014
Nitrogen Plasma Processing of SiO2/4H-SiC Interfaces
A Modic, YK Sharma, Y Xu, G Liu, AC Ahyi, JR Williams, LC Feldman, ...
Journal of electronic materials 43, 857-862, 2014
252014
Effects and mechanisms of RIE on SiC inversion layer mobility and its recovery
G Liu, Y Xu, C Xu, A Basile, F Wang, S Dhar, E Conrad, P Mooney, ...
Applied Surface Science 324, 30-34, 2015
182015
Fluorine-free tungsten films as low resistance liners for tungsten fill applications
J Bakke, Y Lei, Y Xu, K Daito, X Fu, G Jian, K Wu, R Hung, R Jakkaraju, ...
2016 IEEE International Interconnect Technology Conference/Advanced …, 2016
162016
Methods for forming low-resistance contacts through integrated process flow systems
Y Lei, V Banthia, K Wu, X Fu, Y Xu, K Daito, F Ma, P Agarwal, CC Lin, ...
US Patent 9,947,578, 2018
142018
Concentration, chemical bonding, and etching behavior of P and N at the SiO2/SiC (0001) interface
Y Xu, C Xu, G Liu, HD Lee, SM Shubeita, C Jiao, A Modic, AC Ahyi, ...
Journal of Applied Physics 118 (23), 2015
102015
Improved stability of 4H SiC-MOS devices after phosphorous passivation with etching process
YK Sharma, Y Xu, MR Jennings, C Fisher, P Mawby, LC Feldman, ...
International Journal of Fundamental Physical Sciences (IJFPS) 4 (2), 37-42, 2014
82014
Method for forming a metal gapfill
CEN Xi, F Ma, K Wu, Y Lei, K Daito, Y Xu, V Banthia, M Chang, H Ren, ...
US Patent 11,355,391, 2022
52022
Methods To Selectively Deposit Corrosion-Free Metal Contacts
Y Xu, F Ma, Y Lei, K Daito, V Banthia, K Wu, JY Wang, M Chang
US Patent App. 15/817,985, 2018
52018
Process integration approach for selective metal via fill
S You, H Ren, M Naik, Y Xu, F Chen
US Patent 11,164,780, 2021
42021
Methods for depositing semiconductor films
Y Xu, T Kuratomi, AV Gelatos, V Banthia, M Chang, K Daito
US Patent 10,535,527, 2020
32020
Advancements in SiC power devices using novel interface passivation processes
YK Sharma, AC Ahyi, T Issacs-Smith, A Modic, Y Xu, E Garfunkel, ...
Physics of Semiconductor Devices: 17th International Workshop on the Physics …, 2014
32014
The Effects of Phosphorus at the SiO2/4H-SiC Interface
YK Sharma, AC Ahyi, T Issacs-Smith, X Shen, ST Pantelides, XG Zhu, ...
Materials Science Forum 717, 743-746, 2012
32012
Thin PSG process for 4H-SiC MOSFET
YK Sharma, AC Ahyi, T Isaacs-Smith, A Modic, Y Xu, E Granfukel, ...
Materials Science Forum 778, 513-516, 2014
22014
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