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Haifeng Sheng
Haifeng Sheng
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Title
Cited by
Cited by
Year
ZnO Schottky ultraviolet photodetectors
S Liang, H Sheng, Y Liu, Z Huo, Y Lu, H Shen
Journal of crystal Growth 225 (2-4), 110-113, 2001
11872001
Schottky diode with Ag on epitaxial ZnO film
H Sheng, S Muthukumar, NW Emanetoglu, Y Lu
Applied physics letters 80 (12), 2132-2134, 2002
2442002
Selective MOCVD growth of ZnO nanotips
S Muthukumar, H Sheng, J Zhong, Z Zhang, NW Emanetoglu, Y Lu
IEEE Transactions on Nanotechnology 2 (1), 50-54, 2003
1422003
Nonalloyed Al ohmic contacts to MgxZn1−xO
H Sheng, NW Emanetoglu, S Muthukumar, S Feng, Y Lu
Journal of Electronic Materials 31, 811-814, 2002
822002
Ta/Au ohmic contacts to n-type ZnO
H Sheng, NW Emanetoglu, S Muthukumar, BV Yakshinskiy, S Feng, Y Lu
Journal of Electronic Materials 32, 935-938, 2003
802003
A 7nm CMOS technology platform for mobile and high performance compute application
S Narasimha, B Jagannathan, A Ogino, D Jaeger, B Greene, C Sheraw, ...
2017 IEEE International Electron Devices Meeting (IEDM), 29.5. 1-29.5. 4, 2017
642017
Schottky diode with silver layer contacting the ZnO and MgxZn1-xO films
Y Lu, H Sheng, S Muthukumar, NW Emanetoglu, J Zhong
US Patent 6,846,731, 2005
202005
Schottky diode with silver layer contacting the ZnO and MgxZn1− xO films
Y Lu, H Sheng, S Muthukumar, NW Emanetoglu, J Zhong, S Liang
US Patent 7,400,030, 2008
112008
Self-aligned lithographic patterning with variable spacings
SHU Jiehui, Q Fang, DW Fisher, H Huang, J Liu, H Sheng, Z Sun
US Patent 9,711,447, 2017
92017
SiCl4-based reactive ion etching of ZnO and MgxZn1−xO films on r-sapphire substrates
J Zhu, G Saraf, J Zhong, HF Sheng, BV Yakshinskiy, Y Lu
Journal of electronic materials 35, 1311-1315, 2006
82006
Devices and methods of forming SADP on SRAM and SAQP on logic
SHU Jiehui, D Jaeger, GJ Derderian, H Sheng, J Liu
US Patent 9,761,452, 2017
72017
Poly profile engineering to modulate spacer induced stress for device enhancement
V Ho, W Lin, YW Teh, YK Siew, BC Zhang, F Zhang, H Sheng, JB Tan
US Patent 7,993,997, 2011
72011
Zhong. J; Zhang, Z.; Ematetoglu, NW; Yicheng, L
S Muthukumar, H Sheng
Nanotechnology, IEEE 2, 50-54, 2003
72003
Implantation for shallow trench isolation (STI) formation and for stress for transistor performance enhancement
B Zhang, J Widodo, JB Tan, YK Siew, F Zhang, H Sheng, W Lin, YW Teh, ...
US Patent App. 12/214,854, 2009
62009
Local-Topography-Induced Defects during Tungsten Chemical Mechanical Polishing and Their Impact on Back End of Line
H Yu, XB Wang, HF Sheng, W Lu, MS Zhou
Journal of the Electrochemical Society 156 (1), H64, 2008
62008
Notched fin structures and methods of manufacture
SHU Jiehui, ZHU Baofu, H Sheng, J Liu, SM Pandey, J Singh
US Patent App. 15/292,808, 2018
52018
Competitive and cost effective copper/low-k interconnect (BEOL) for 28 nm CMOS technologies
R Augur, C Child, JH Ahn, TJ Tang, L Clevenger, D Kioussis, H Masuda, ...
Microelectronic engineering 92, 42-44, 2012
52012
Integrated circuits including a dummy metal feature and methods of forming the same
H Sheng, S Zhao, JB Tan, SY Siah
US Patent 10,062,641, 2018
22018
UV assisted densification of perhydropolysilazane (PHPS) based spin-on glass in high aspect ratio gap fill structure
S Mehta, H Sheng, R Krishnan, B Haran, T Han, Z Bayindir, M Berardi, ...
ECS Transactions 85 (13), 717, 2018
22018
Integrated circuit system employing alternating conductive layers
H Sheng, F Zhang, JB Tan, BC Zhang, DK Sohn
US Patent 9,147,654, 2015
22015
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